Generating device i.e. plasma-jet source, for generating scalable linear plasma in e.g. vacuum atmospheric pressures, has plasma reactor comprising contour with side surfaces, and slot antennas arranged along longitudinal axis of reactor

摘要

The device has a microwave generator connected with a cuboid shaped plasma reactor (5) i.e. water- or air cooled plasma reactor, over a channel structure and slot antennas (6). A high frequency generator (1) e.g. magnetron, is connected with the slot antennas attached to the reactor over a circulator (2) i.e. water load, a high-frequency tuner (3) and H-shaped branches and/or parallel branches (4) and/or functionally identical components. The reactor comprises an outer contour with planar side surfaces, and the slot antennas are arranged along a longitudinal axis of the reactor.