A fast boundary-finite element approach for estimating anchor losses in Micro-Electro-Mechanical System resonators

摘要

This paper is focused on a fast and reliable estimate of anchor energy losses from a Micro-Electro-Mechanical System resonator, working at pressure in the order of the microbar, due to the scattering of elastic waves from the resonator into the substrate to which it is attached. The proposed numerical method is based on the fundamentals of the analytical procedure employed to estimate quality factors of resonators in the literature and consists in the modeling of the resonator by Finite Elements and of the radiated waves dissipation into the substrate by collocation Boundary Element Method. In order to simulate as quickly as possible an accurate response of the substrate in real time, we further consider H-matrix/vector product in the Boundary Element Method. The proposed numerical approach results in a very small elapsed computational time and it will therefore allow applications to real life engineering problems, targeted as future investigations.