Stabilizing the pull-in instability of an electro-statically actuated micro-beam using piezoelectric actuation

摘要

In the present article an investigation is presented into the stability of an electro-statically deflected clamped-clamped micro-beam sandwiched by two piezoelectric layers undergo ing a parametric excitation applying an AC voltage to these layers. Applying an electrostatic actuation not only deflects the micro-beam but also decreases the bending stiffness of the structure, which can lead the structure to an unstable position by undergoing a saddle node bifurcation. Utilizing an appropriate AC actuation voltage to the piezoelectric layers pro duces a time varying axial force, which can play the role of a stabilizer exciting the system parameter. The governing equation of the motion is a nonlinear electro-mechanically cou pled type PDE, which is derived using variational principle and discretized, applying Eigen function expansion method. The resultant is a Mathieu type equation in its damped form. Using Floquet theory for single degree of freedom system the stable and unstable regions of the problem are investigated. The effects of viscous damping and electrostatic actuation on the stable regions of the problem are also studied.