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Stud Bumping and Die Attach for Expanded Flip Chip Applications

机译:用于扩展倒装芯片应用的螺柱凸块和管芯连接

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摘要

A good form factor and excellent electrical performance are enabling flip chip bonding to emerge as one of the high growth areas of semiconductor assembly. Growth of this bonding technique will accelerate as substrate prices fall and a manufacturing infrastructure is developed. Gold stud bumps with gold-gold (Au-Au) interconnect (GGI) have developed as a niche segment of the flip chip market. Gold stud bumping uses a variation of traditional wire bond technology to generate gold bumps on a wafer. After bumping, a wafer is diced and flipped, then thermal-sonically welded to the gold-plated substrate. Metallurgi-cally, a monometallic thermalsonic weld has higher strength and reliability than a solder joint produced by conventional flip chip methods. Joint development of the stud bump and flip chip die attach process, with optimization of all processes, provides a faster development path than a single party development. These partnerships advance the capabilities of the industry by providing a complete solution.
机译:良好的外形和出色的电气性能使倒装芯片键合成为半导体组件的高增长领域之一。随着基板价格的下降和制造基础设施的发展,这种粘合技术的增长将加速。具有金-金(Au-Au)互连(GGI)的金钉凸点已发展成为倒装芯片市场的细分市场。金钉凸块使用传统键合技术的变体在晶片上产生金凸块。撞击后,将晶圆切成小方块并翻转,然后热声焊接至镀金基板。冶金学上,单金属热超声焊接比常规倒装芯片方法生产的焊点具有更高的强度和可靠性。联合开发凸块凸块和倒装芯片管芯附着工艺,并优化所有工艺,这比单方开发提供了更快的开发路径。这些伙伴关系通过提供完整的解决方案来提高行业的能力。

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