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Improved underfill adhesion in flip-chip packages by means of ultraviolet light/ozone treatment

机译:通过紫外线/臭氧处理改善倒装芯片封装中的底部填充粘合性

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摘要

The interfacial adhesion between the epoxy-based soldermask and underfill resin is successfully improved by means of ultraviolet light/ozone (UV/O3) treatment. There is an optimized treatment condition that can impart the highest interfacial bond quality. The underlying mechanisms are evaluated based on several techniques, including X-ray photoelectron spectroscopy (XPS), contact angle measurement and nanoindentation of the UV/O3 treated soldermask surface. Functionally similar changes in chemical element, wettability, and elastic modulus are identified of the substrate with respect to treatment time, which are also correlated to the improvement of interfacial bond strength. In particular, there is a linear relationship between the weighted dipole moment (obtained from the XPS analysis) and the surface polarity (calculated from the contact angle measurements) of the treated surface, confirming that the same conclusion can be drawn from the two different techniques. The UV/O3 treatment is proven to be efficient in retaining the interfacial bond quality even after hygrothermal ageing.
机译:借助紫外线/臭氧(UV / O3)处理,可以成功地提高环氧树脂基阻焊剂与底部填充树脂之间的界面粘合力。有一个可以赋予最高界面粘合质量的最佳处理条件。基于多种技术评估了潜在的机理,包括X射线光电子能谱(XPS),接触角测量和经UV / O3处理的阻焊层表面的纳米压痕。相对于处理时间,可以确定基材的化学元素,润湿性和弹性模量在功能上的相似变化,这些变化也与界面粘合强度的提高有关。特别是,经过处理的表面的加权偶极矩(从XPS分析获得)与表面极性(从接触角测量值计算)之间存在线性关系,从而证实可以从两种不同的技术得出相同的结论。 。事实证明,即使经过湿热老化,UV / O3处理仍可有效保持界面粘结质量。

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