机译:超过2x-nm半节距的实际应用中等离子平版印刷的分辨率极限
Nano Photonics Laboratory School of Mechanical Engineering Yonsei University 50 Yonsei-ro, Seodaemun-gu,Seoul 120-749, Republic of Korea;
Nano Photonics Laboratory School of Mechanical Engineering Yonsei University 50 Yonsei-ro, Seodaemun-gu,Seoul 120-749, Republic of Korea;
Nano Photonics Laboratory School of Mechanical Engineering Yonsei University 50 Yonsei-ro, Seodaemun-gu,Seoul 120-749, Republic of Korea;
Nano Photonics Laboratory School of Mechanical Engineering Yonsei University 50 Yonsei-ro, Seodaemun-gu,Seoul 120-749, Republic of Korea;
Nano Photonics Laboratory School of Mechanical Engineering Yonsei University 50 Yonsei-ro, Seodaemun-gu,Seoul 120-749, Republic of Korea;
机译:使用等离子腔透镜增强半间距32 nm和22 nm光刻的外观轮廓
机译:用于光刻和成像的平面超透镜的简单设计,半间距分辨率低至20 nm
机译:使用嵌段共聚物光刻技术对具有高半间距分辨率的柔性设计进行二维图案化
机译:在极端紫外光刻技术上对半间距2x-nm进行CD校正
机译:纳米压印光刻技术的发展及其在等离子体增强电子源中的应用。
机译:等离子应用的金纳米结构阵列:退火岛膜与纳米压印光刻
机译:等离子体干扰光刻,用于低成本制造致密线,具有亚50nm半间距