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Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams

机译:在微型和纳米悬臂梁的刚度应力引起的变化

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摘要

The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical predictions are unable to rigorously and quantitatively reconcile these observations. In this Letter, we present the first controlled measurements of stress-induced change in cantilever stiffness with commensurate theoretical quantification. Simultaneous measurements are also performed on equivalent clamped-clamped beams. All experimental results are quantitatively and accurately predicted using elasticity theory. We also present conclusive experimental evidence for invalidity of the longstanding and unphysical axial force model, which has been widely applied to interpret measurements using cantilever beams. Our findings will be of value in the development of micro- and nanoscale resonant mechanical sensors.
机译:表面应力对悬臂梁刚度的影响仍然是物理科学中的出色问题。虽然许多实验研究报告了由于表面应力导致的显着僵硬变化,但理论预测无法严格和定量地调和这些观察结果。在这封信中,我们介绍了具有相应理论定量的悬臂刚度的第一次受控测量。同时测量还在等效夹紧夹持的梁上执行。使用弹性理论定量和准确地预测所有实验结果。我们还为长期和不受神经轴向力模型的无效性提供了确凿的实验证据,这已广泛应用于使用悬臂梁来解释测量。我们的研究结果将具有价值的微型和纳米级谐振机械传感器。

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