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Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies

机译:具有可变自然频率的耦合微机械悬臂的大集合中的非简并参量共振

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摘要

We investigate the collective dynamics and nondegenerate parametric resonance (NPR) of copla-nar, interdigitated arrays of microcantilevers distinguished by their cantilevers having linearly expanding lengths and thus varying natural frequencies. Within a certain excitation frequency range, the resonators begin oscillating via NPR across the entire array consisting of 200 single-crystal silicon cantilevers. Tunable coupling generated from fringing electrostatic fields provides a mechanism to vary the scope of the NPR. Our experimental results are supported by a reduced-order model that reproduces the leading features of our data including the NPR band. The potential for tailoring the coupled response of suspended mechanical structures using NPR presents new possibilities in mass, force, and energy sensing applications, energy harvesting devices, and optomechanical systems.
机译:我们研究了微悬臂的共指交叉阵列的集体动力学和非简并参量共振(NPR),这些微悬臂的特征在于其悬臂具有线性扩展的长度,从而改变了固有频率。在一定的激励频率范围内,谐振器开始通过NPR在由200个单晶硅悬臂组成的整个阵列中振荡。由边缘静电场产生的可调耦合提供了一种改变NPR范围的机制。我们的实验结果得到了降阶模型的支持,该模型再现了包括NPR波段在内的数据的主要特征。使用NPR调整悬架机械结构的耦合响应的潜力为质量,力和能量传感应用,能量收集设备和光机系统提供了新的可能性。

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