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Direct growth of self-crystallized graphene and graphite nanoballs with Ni vapor-assisted growth: From controllable growth to material characterization

机译:Ni蒸气辅助生长直接生长自结晶石墨烯和石墨纳米球:从可控生长到材料表征

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摘要

A directly self-crystallized graphene layer with transfer-free process on arbitrary insulator by Ni vapor-assisted growth at growth temperatures between 950 to 1100°C via conventional chemical vapor deposition (CVD) system was developed and demonstrated. Domain sizes of graphene were confirmed by Raman spectra from ~12 nm at growth temperature of 1000°C to ~32 nm at growth temperature of 1100°C, respectively. Furthermore, the thickness of the graphene is controllable, depending on deposition time and growth temperature. By increasing growth pressure, the growth of graphite nano-balls was preferred rather than graphene growth. The detailed formation mechanisms of graphene and graphite nanoballs were proposed and investigated in detail. Optical and electrical properties of graphene layer were measured. The direct growth of the carbon-based materials with free of the transfer process provides a promising application at nanoelectronics.
机译:通过常规化学气相沉积(CVD)系统,在950至1100°C的生长温度下,通过Ni气相辅助生长,在任意绝缘体上进行无转移工艺的直接自结晶石墨烯层,并进行了无转移工艺。石墨烯的畴尺寸通过拉曼光谱确定,分别在1000°C的生长温度〜12 nm和1100°C的生长温度〜32 nm。此外,取决于沉积时间和生长温度,石墨烯的厚度是可控制的。通过增加生长压力,优选石墨纳米球的生长,而不是石墨烯的生长。提出并详细研究了石墨烯和石墨纳米球的形成机理。测量了石墨烯层的光学和电学性质。不含转移过程的碳基材料的直接生长为纳米电子学提供了有希望的应用。

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