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Flexure-based Roll-to-roll Platform: A Practical Solution for Realizing Large-area Microcontact Printing

机译:基于挠曲的卷对卷平台:实现大面积微接触印刷的实用解决方案

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摘要

A continuous roll-to-roll microcontact printing (MCP) platform promises large-area nanoscale patterning with significantly improved throughput and a great variety of applications, e.g. precision patterning of metals, bio-molecules, colloidal nanocrystals, etc. Compared with nanoimprint lithography, MCP does not require a thermal imprinting step (which limits the speed and material choices), but instead, extreme precision with multi-axis positioning and misalignment correction capabilities for large area adaptation. In this work, we exploit a flexure-based mechanism that enables continuous MCP with 500 nm precision and 0.05 N force control. The fully automated roll-to-roll platform is coupled with a new backfilling MCP chemistry optimized for high-speed patterning of gold and silver. Gratings of 300, 400, 600 nm line-width at various locations on a 4-inch plastic substrate are fabricated at a speed of 60 cm/min. Our work represents the first example of roll-to-roll MCP with high reproducibility, wafer scale production capability at nanometer resolution. The precision roll-to-roll platform can be readily applied to other material systems.
机译:连续的卷对卷微接触印刷(MCP)平台可实现大面积的纳米级图案化,并显着提高了生产量,并具有多种应用,例如:与纳米压印光刻技术相比,MCP不需要热压印步骤(这限制了速度和材料选择),而是具有多轴定位和未对准校正的极高精度大面积适应能力。在这项工作中,我们利用基于挠曲的机制实现了连续MCP的精确度为500 nm,力控制为0.05N。全自动卷对卷平台与新的回填MCP化学工艺相结合,该化学工艺针对金和银的高速图案化进行了优化。在60厘米/分钟的速度下,在4英寸塑料基板上的不同位置制作300、400、600 nm线宽的光栅。我们的工作代表了具有高重现性,纳米级晶圆级生产能力的卷对卷MCP的第一个示例。精密的卷对卷平台可轻松应用于其他材料系统。

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