A systematic experimental study and theoretical modeling of the device physics of polydimethylsiloxane “pushdown” microfluidic valves are presented. The phase space is charted by 1587 dimension combinations and encompasses 45-295 μm lateral dimensions, 16-39 μm membrane thickness, and 1-28 psi closing pressure. Three linear models are developed and tested against the empirical data, and then combined into a fourth-power-polynomial superposition. The experimentally validated final model offers a useful quantitative prediction for a valve's properties as a function of its dimensions. Typical valves (80-150 μm width) are shown to behave like thin springs.
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