A systematic experimental study and theoretical modeling of the device physics of polydimethylsiloxane “pushdown” microfluidic valves are presented. The phase space is charted by 1587 dimension combinations and encompasses 45–295 µm lateral dimensions, 16–39 µm membrane thickness, and 1–28 psi closing pressure. Three linear models are developed and tested against the empirical data, and then combined into a fourth-power-polynomial superposition. The experimentally validated final model offers a useful quantitative prediction for a valve's properties as a function of its dimensions. Typical valves (80–150 µm width) are shown to behave like thin springs.
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