Energy-filtered (or selected) electron imaging is one of the future directions of high-resolution electron microscopy (HREM). In this paper, the characteristics and applications of energy-selected electron imaging at high-resolution for structure determinations are illustrated. It is shown that image contrast can be dramatically improved with the use of an energy filter. High-resolution chemical-sensitive imaging using ionization-loss electrons is demonstrated in studies of Ni/Ti and Al/Ti multilayer thin films. It is also shown that the spatial resolution of energy-selected ionization edge electron images is dominated by the signal-to-noise ratio. Experimental parameters which may be selected to improve the signal-to-noise ratio are discussed.
展开▼
机译：能量过滤（或选择的）电子成像是高分辨率电子显微镜（HREM）的未来方向之一。本文阐述了高分辨率能量选择电子成像在结构确定中的特性和应用。结果表明，使用能量滤波器可以显着改善图像对比度。 Ni / Ti和Al / Ti多层薄膜的研究证明了使用电离损耗电子的高分辨率化学敏感成像。还表明，能量选择的电离边缘电子图像的空间分辨率由信噪比决定。讨论了可以选择以改善信噪比的实验参数。
展开▼
