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Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope

机译:微机械静电悬浮陀螺仪中的自旋速率效应

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摘要

Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (MEMS) gyroscope where a free-spinning rotor is electrostatically suspended in an evacuated vacuum cavity and functions as a dual-axis angular rate sensor. Theoretical models of the scale factor and measurement range of such a spinning-rotor gyroscope are derived. The experimental results indicate that the measured scale factors at different settings of the spin rate match well with the theoretical predication. In order to separate the disturbance component of the rotation control loop on the gyroscope output, a testing strategy is proposed by operating the gyroscope at different spin rates. Experimental results on a prototype gyroscope show that the squared drive voltage generated by the rotation control loop is approximately proportional to the noise of the gyroscope output. It was further investigated that an improved performance of such spinning-rotor gyroscopes can be achieved by operating the gyroscope rotor at an optimal spin rate.
机译:高速旋转转子陀螺仪的自旋速率将对角速率传感器的性能(例如比例因子,分辨率,测量范围和偏置稳定性)产生重大影响。本文介绍了自旋速率对微机电系统(MEMS)陀螺仪性能指标的影响,其中自由旋转的转子静电悬浮在真空真空腔中,并用作双轴角速率传感器。推导了这种旋转转子陀螺仪的比例因子和测量范围的理论模型。实验结果表明,在不同转速下,所测得的比例因子与理论预测值吻合良好。为了分离陀螺仪输出上旋转控制环路的干扰分量,提出了一种通过以不同的自旋速率操作陀螺仪的测试策略。原型陀螺仪上的实验结果表明,旋转控制环路产生的平方驱动电压与陀螺仪输出的噪声近似成比例。进一步研究了通过以最佳旋转速率操作陀螺仪转子,可以实现这种旋转转子陀螺仪的性能提高。

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