Hybrid microfabrication and 5-DOF levitation of micromachined electrostatically suspended gyroscope

摘要

A newly designed electrostatically suspended rotational microgyroscope, with optimised electrode structures and interconnections, is presented. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures using UV-LIGA, DRIE of silicon rotor, microassembly and solder bonding, are employed to fabricate this device. Five-degree-offreedom stable levitation control of the rotor, with fast initial levitation process and good time synchronisation at the null position for each axis, has been demonstrated.