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Gate Tunable Transport in Graphene/MoS2/(Cr/Au) Vertical Field-Effect Transistors

机译:石墨烯/ MoS2 /(Cr / Au)垂直场效应晶体管中的栅极可调传输

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摘要

Two-dimensional materials based vertical field-effect transistors have been widely studied due to their useful applications in industry. In the present study, we fabricate graphene/MoS2/(Cr/Au) vertical transistor based on the mechanical exfoliation and dry transfer method. Since the bottom electrode was made of monolayer graphene (Gr), the electrical transport in our Gr/MoS2/(Cr/Au) vertical transistors can be significantly modified by using back-gate voltage. Schottky barrier height at the interface between Gr and MoS2 can be modified by back-gate voltage and the current bias. Vertical resistance (Rvert) of a Gr/MoS2/(Cr/Au) transistor is compared with planar resistance (Rplanar) of a conventional lateral MoS2 field-effect transistor. We have also studied electrical properties for various thicknesses of MoS2 channels in both vertical and lateral transistors. As the thickness of MoS2 increases, Rvert increases, but Rplanar decreases. The increase of Rvert in the thicker MoS2 film is attributed to the interlayer resistance in the vertical direction. However, Rplanar shows a lower value for a thicker MoS2 film because of an excess of charge carriers available in upper layers connected directly to source/drain contacts that limits the conduction through layers closed to source/drain electrodes. Hence, interlayer resistance associated with these layers contributes to planer resistance in contrast to vertical devices in which all layers contribute interlayer resistance.
机译:基于二维材料的垂直场效应晶体管由于其在工业中的有用应用而被广泛研究。在本研究中,我们基于机械剥离和干转移法制造了石墨烯/ MoS2 /(Cr / Au)垂直晶体管。由于底部电极由单层石墨烯(Gr)制成,因此我们的Gr / MoS2 /(Cr / Au)垂直晶体管中的电传输可以通过使用背栅电压进行显着修改。可以通过背栅电压和电流偏置来修改Gr和MoS2之间的界面处的肖特基势垒高度。将Gr / MoS2 /(Cr / Au)晶体管的垂直电阻(Rvert)与常规横向MoS2场效应晶体管的平面电阻(Rplanar)进行比较。我们还研究了垂直和横向晶体管中各种厚度的MoS2通道的电性能。随着MoS2厚度的增加,Rvert增加,而Rplanar减小。较厚的MoS2膜中Rvert的增加归因于垂直方向的层间电阻。但是,Rplanar对于较厚的MoS2膜显示出较低的值,这是因为直接连接到源极/漏极触点的上层中有过多的载流子,从而限制了通过与源极/漏极接触的层的传导。因此,与其中所有层都贡献层间电阻的垂直器件相反,与这些层相关的层间电阻有助于平面电阻。

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