高纯六氟乙烷中氯化氢的傅里叶变换红外定量分析

摘要

As gaseous impurity, the content of hydrogen chloride must be strictly controlled within a cer-tain range to high-purified hexafluoroethane, which is used as cleaning and etching gas in electronic indus-try. In this paper, we set up a method to analyze the hydrogen chloride ’s content, and by the method, we achieved to do its’ quantitative analysis in product.%电子行业用作清洗和蚀刻的特种气体六氟乙烷对杂质组分HCl的含量要求严格控制在一定范围，本文建立了用傅里叶变换红外光谱仪分析其中HCl杂质的分析方法，并实现了对产品中HCl的定量分析。