MPCVD法制备纳米金刚石薄膜的研究及应用进展

摘要

通过介绍不同气源和相关工艺参数（温度、功率等）对MPCVD法制备纳米金刚石的影响，并对部分学者的研究成果进行简述。然后简要概括了MPCVD纳米金刚石在各种窗口、宽禁带半导体功率器件以及生物医学中的应用，最后对纳米金刚石未来的发展做出展望。%This paper is mainly about the different gas source and related process parameters(like temperature,pow-er,etc.)of MPCVD preparing nano-diamond,and gives a brief description of results of some scholars’researches. Then, this paper summarizes the applications of MPCVD nano-diamond in various windows,wide band gap semiconductor pow-er devices and biomedical applications. Finally,we prospect the future development of nano-diamond.