双热源质量流量传感器数值模拟研究

摘要

在微小气体流量测量中,双热源型质量流量传感器具有精度高、反应快以及良好的环境温度适应性等特点.利用ANSYS.FLUENT软件,从反映传感器性能的线性度及灵敏度两大指标出发,改变质量流量传感器热流密度、热源间距、管径等参数进行数值模拟分析,分析了影响双热源型质量流量传感器性能的主要因素,从而为双热源型质量流量传感器的改进提供参考.%The Double-Heat mass flow sensor has the characteristics of high accuracy,quick response and good adapt-ability to the temperature for the micro gas flow measurement. This paper uses ANSYS.FLUENT software,starting from two evaluation index which reflects the sensor performance,linearity and sensitivity. Numerical simulation analysis by changing the heat flow,heat distance,diameter of tube. The main factors affecting the performance of Double-Heat Mass Flow Sensor,which can provide the basis for improving the quality of Double-Heat Mass Flow Sensor,are concluded.