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A mass flow sensor, a mass flow meter including the mass flow sensor, and a mass flow controller including the mass flow sensor.
A mass flow sensor, a mass flow meter including the mass flow sensor, and a mass flow controller including the mass flow sensor.
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机译:质量流量传感器,包括质量流量传感器的质量流量计,以及包括质量流量传感器的质量流量控制器。
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摘要
A mass flow sensor is provided with reduced zero point fluctuation, and a mass flow meter and a mass flow controller using the mass flow sensor, the mass flow sensor comprising a U-shaped flow path passage in which a fluid flows from first end to a second end, having a bottom portion and two straight portions connecting the bottom portion to the ends, a first thermal resistor wound around one of the straight portions, a second thermal resistor wound around the same straight portion as the first thermal resistor and provided away from the first thermal resistor toward the second end, and a heat dissipating portion provided so as to be in contact with the flow path passage on the side opposite to the second thermal resistor across the first thermal resistor.
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