Single-chip mass flow controller with integrated coriolis flow sensor and proportional control valve

摘要

We have designed, fabricated and tested the, to our knowledge, first ever single-chip mass flow controller with an integrated Coriolis mass flow sensor and a proportional control valve. A minimum internal volume is obtained, because the complete fluid path is integrated in a single chip. We demonstrated that the system can control mass flow up to 70 mg h-1 nitrogen gas at an applied pressure of 500 mbar.