嵌套环式MEMS振动陀螺的静电修调算法

摘要

对于工作在n=2模态谐振结构,静电修调是一种消除频率裂解、实现模态匹配的常用方法.基于环形谐振子的刚度扰动模型,提出了一种直观而实用的修调算法.通过巧妙地近似,并将嵌套环结构的内置修调电极等效为两簇簇带负刚度的“径向弹簧”,从而将单环谐振结构的理论模型成功应用于多环嵌套结构.最后通过静电修调实验对该算法进行了验证,实现了带误差谐振子的模态匹配.实验结果表明:通过该算法频率裂解从15 Hz左右被修到0.03 Hz左右.%For the resonator operating at n =2 modes,electrostatic tuning is a commonly used method to reduce the permanent frequency mismatch.On the basis of the stiffness perturbation model for a ring,an intuitive and utility algorithm is introduced.In this algorithm,each tuning electrode is regarded as two rows of radial springs with negative stiffness,so that the theoretical model of ring resonator is successfully applied in the disk resonator gyroscope.Finally,the algorithm is verified by electrostatic tuning experiment,and matching of the two modes is realized.Results of experiments show that,the frequency split of resonators is decreased to about 0.03 Hz from original about 15 Hz.