多元等离子体浸没离子注入与沉积和磁控溅射技术制备TiAlSiN/WS2多层薄膜的力学性能和腐蚀行为

摘要

为了降低超硬TiAlSiN复合涂层的摩擦因数,采用多元等离子体浸没离子注入与沉积和射频(RF)磁控溅射技术制备TiAlSiN/WS2多层薄膜,利用XRD、SEM、Raman光谱、纳米探针、摩擦和电化学试验对薄膜的微结构、力学性能和腐蚀行为进行测试与分析.SEM结果表明:TiAlSiN/WS2多层薄膜具有清晰的调制周期.纳米硬度结果表明,TiAlSiN/WS2多层薄膜硬度介于TiAlSiN和WS2涂层硬度之间.摩擦实验结果证实TiAlSiN/WS2多层薄膜的摩擦大数低于TiAlSiN涂层的,且摩擦过程平稳.此外,TiAlSiN/WS2多层薄膜表现出良好的抗腐蚀能力,在相对较小的调制周期内,其腐蚀电流密度显著降低.%To reduce the friction coefficient of the superhard TiAlSiN composite coating,TiAlSiN/WS2 multilayers were synthesized by multiple plasma immersion ion implantation and deposition as well as radio-frequency (RF) magnetron sputtering.X-ray diffraction (XRD),scanning electron microscopy (SEM),Raman spectrum,nano indentation,tribological and electrochemical tests were employed to characterize the microstructure,mechanical properties and corrosion behavior of the as-deposited multilayers.SEM results reveal that the TiAlSiN/WS2 multilayers have a good periodicity.Nano indentation results show that the nanohardness of TiAlSiN/WS2 multilayers is between that of the TiAlSiN and WS2 coatings.Tribological tests prove that the friction coefficient of the TiAlSiN/WS2 multilayers is lower and more stable than that of the TiAlSiN coating.In addition,the TiAlSiN/WS2 multilayers show excellent corrosion resistance and the corrosion current density decreases obviously at a relative small modulation period.