百万像素中波红外焦平面组件研制

摘要

The middle wave infrared focal plane assembly (IRFPA) is the core detector for the infrared imaging channel in the staring camera of the GF-4 satellite. In order to fully meet the application requirements, the project team of NCRIEO adopted the mainstream IRFPA technical route to carry out the research on the large format middle wave IRFPA. Breakthroughs have been achieved in key technologies including high uniformity middle wave IR material preparation, million pixels middle wave IR chip processing, ultra large format ROIC design, high density Indium array flip chip bonding, and large capacity micro dewar sealing. Million pixels large array middle wave IRFPA with 1 024×1 024 pixels are developed. An optimied design is made to improve the responsive uniformity, space environmental adaptability and reliability of the large array middle wave IRFPA, which has been tested and experimentally verified on the ground. The NETD of the middle wave IRFPA is as low as 21.4mK. The operability is better than 99%. The performance proves to be stable after 1 500h storage under 70℃ and 12 000 times On/Off temperature shock test. The results of the test and experiment indicate that the performance as well as the environmental adaptability and reliability of the 1 024×1 024 middle wave IRFPA fully complies with the technical requirements.%中波红外焦平面组件是“高分四号”卫星凝视相机红外成像通道的核心器件。为满足航天型号应用要求，华北光电技术研究所项目团队立足国内技术基础，采用主流的红外焦平面组件技术路线，突破了高均匀性中波红外材料制备、百万像素中波探测器芯片加工、超大规模读出电路设计、高密度铟柱阵列倒装互连、大冷头尺寸微型杜瓦封装等关键技术，研制了像元数为1024×1024的百万像素大面阵中波红外焦平面组件，对大面阵中波红外焦平面组件的像元响应一致性、航天环境适应性、可靠性等进行了优化设计，并进行了地面测试和试验验证。中波红外焦平面组件的噪声等效温差达到21.4mK、有效像元率优于99%，经过高温70℃条件下1500h长期存储和12000次开关机温度冲击等试验后性能稳定。测试和试验结果表明：像元数为1024×1024中波红外焦平面组件产品的性能、环境适应性和可靠性满足技术要求。