光学零件面形偏差的标准研究

摘要

The difference between the GB2831’s new and the old evaluation standard of the surface form deviation of optical elements is compared. Using the technology of the Zernike polynomial fitting, the calculation and evaluation of the surface form deviation are achieved on the Matlab. The correspondence between the new and the old evaluation parameters in the standards is proved by comparing the calculated result with the visual measured result.%对比了GB2831新旧光学零件面形偏差检验标准的不同。运用zernike多项式拟合技术，使用matlab软件实现了面形偏差的评价，并将该方法的结果与传统测量方法的结果进行了比较，验证了新旧标准评价参数的对应关系。