Optical system deviation estimating apparatus, optical system deviation adjusting apparatus, optical system deviation estimating method and optical system deviation adjusting method

摘要

An optical system deviation estimating apparatus includes an erected/inverted attitude setting means 9 for changing dispositional attitude of an optical system under test, a non-interferometric type wavefront measuring means 10 for measuring wavefronts at the attitudes as set up without resorting to interference phenomenon of light, a polynomial approximation means 15 for expanding measured wavefront values determined by the non-interferometric type wavefront measuring means 10 to a polynomial, an averaging arithmetic means 11 for averaging the measured values derived from output of the non-interferometric type wavefront measuring means 10 or alternatively arithmetic values derived from output of the polynomial approximation means 15, and a polynomial specific coefficient extraction arithmetic means 16 for extracting specific coefficient values of the polynomial.