Study of GaAs/GaAlAs Multilayer Structural Materials by Electrolyte Electroreflectance

摘要

The electrolyte electroreflectance (EER) method combined with the electrochemical anodic dissolution has been used tostudy GaAs / GaAlAs multilayer structural materials. According to the variation of the EER spectra during the anodic dissolu-tion process, the characteristics of GaAs / GaAlAs multilayer structural materials, such as the properties of interface, p-n junc-tion positions and Al content profiles were obtained.