深浮雕连续微光学元件制作方法

摘要

In this paper, a new method for making deep continuous relief micro-optic elements by combining wet etching with dry etching in a whole process of fabrication is presented. As an experimental verification and application of this method, the course and result of the fabrication of micro-prism array is provided herein, and some phenomena in the process are discussed.%提出一种连续深浮雕微光学元件的制作方法.在移动掩模的基础上经湿法显影获得光刻胶元件良好的面形,然后结合干法刻蚀将图形通过蚀速比放大的办法精密传递到石英片基上,从而使最终的元件达到设计的浮雕深度.作者对整个过程进行了考察和讨论,并以微棱镜为例进行了实验验证,为进一步制作大数值孔径连续表面微光学元件打下了技术基础.