二元光学元件激光直写设备主轴速度调节的一种新方法

摘要

A precision servo control system for Binary Optical Element (BOE ) laser direct-writing device is introduced. The structure of the spindle servo system and the performance requirements of the control system are analyzed. In the BOE laser direct-writing device, the adjusting effect of spindle velocity is one of the key factors for determining the lithography effectiveness and accuracy. A new method for a utomatically adjusting the spindle velocity is proposed in the paper. The method juges the extreme point of out-of-focus signal and calculates the time intervals between the adjacent extreme points by means of the characteristics of out-of -focus signal, and finally estimates the band of the out-of-focus signal. The lithography effectiveness can be obviously improved with this method.%介绍了二元光学元件激光直写设备的精密伺服控制系统，分析了主轴 伺服系统 的结构与控制系统的性能要求。在二元光学元件激光直写设备中，主轴速度调节效果的好坏是决定刻划效率与精度的关键因素之一。本文提出了利用离焦信号的特点，判断出离焦信号的极值点，并计算相邻极值点之间的时间间隔，最终估算出离焦信号频带，并依据离焦信号的频带自动调节主轴速度的新方法。采用此方法可极大地提高刻划效率。