Programmable Holographic Optical Elements as Adaptive Optics in Optical Diagnostics Devices

摘要

This paper reports a combined, Hartmann/Digital Holographic interferometry inspection system for inspecting optical components that do not easily lend themselves to conventional interferometric or Hartmann inspection. A programmable holographic optical element (HOE) preconditions wavefronts to extend the dynamic range of interferometry measurements and also transforms the same system into a scanning Hartmann operation, which has lower resolution but higher dynamic range. Inspecting aspherical surfaces with existing interferometers requires special, computer generated holographic optical elements to transform the wavefront to within the dynamic range of the interferometer. The Hartmann measurement provides the information required to precondition a reference wave that avails the measurement process to the more precise phase shifting interferometry. The SLM offers yet other benefits including a method for minimizing the effects of speckle on the measurement. The paper provides example measurements, discusses the limitations, and suggests other potential applications.