Microwave measurement of the conductivity of conducting thin films

摘要

A new method to measure the conductivity of conducting thin films in a contactle s s fashion was demonstrated. A microwave compact equipment working at 94 GHz was used to measure the amplitude of the reflection coefficient of the microwave sig na l. Indium Tin Oxide films having conductivity of 8.20×10 4～8.02×10 5 S/m on the glass substrates were used as the samples. An evaluation equation was bui lt to determine the conductivity from the measured amplitude of the reflection c oefficient. The evaluated conductivity of conducting thin films agrees well with their actual value.