离子束溅射制备“日盲”紫外诱导透射滤光片

摘要

对“日盲”紫外诱导透射滤光片进行了理论设计与分析,并分别优化了离子束溅射法沉积ZrO2、SiO2和Al薄膜的工艺.利用反射与透射光谱反演获得了ZrO2和SiO2薄膜的光学常数,并由JGS1/SiO2/Al/SiO2/air (SAS)样品的变角度椭偏光谱反演精确获得了Al薄膜的光学常数.在此基础上,采用离子束溅射沉积方法并利用上述3种薄膜材料优化制备了“日盲”紫外诱导透射滤光片,测量了滤光片的光谱性能.光谱性能分析表明,滤光片的峰值波长位于264 nm,峰值透过率大于60.0％,透过峰带宽(FWHM)约为13 nm,在300～350 nm波段的截止度达到了2.6OD.研究认为制约离子束溅射制备“日盲”紫外诱导透射滤光片性能的主要因素是Al金属膜的溅射沉积速率以及沉积Al膜时腔体中残余的O2含量.%Solar-blind UV induced Transmission Filters (SBU-ITFs) were fabricated by ion-beam sputtering. Firstly, SBU-ITFs were designed and analyzed theoretically, and the deposition of ZrO2, SiO2 and A1 films by ion beam sputtering was optimized. The optical constants of ZrO2 and SiO2 films were derived from the transmitting and reflecting spectra, and the optical constant of Al film was determined by the inversion of the variable incidence ellipsometric spectrum of a sample JGS1/SiO2/A1/ SiO2/air(SAS). On the basis of the research, the SBU-ITFs were fabricated by using the three films a-bove and their optical properties were measured. The measurement for SBU-ITFs shows that the peak transmittance of the filter at the 264 nm center wavelength is larger than 60%, the transmittance band width (FWHM) is about 13 nm, and the optical density in the 300 - 350 nm cutoff spectral region reaches to 2. 6. The analysis of the transmittance shows that the main factors affecting the properties of SBU-ITFs are a slower deposition speed for Al film and smaller amount of O2 contents remaining in the chamber during the deposition of A1 film.