N2 capacitively coupled rf discharge was simulated by PIC/MCC model,in which we computed the rf electric field,the density and mean energy of charged particles (e,N2+,N+),the energy distribution of ions(N2+,1ST) bombarding rf electrode and their variation by following different discharge parameter (p,Frf). The simulated results show that,ions (N2+,N+) seem to follow the electric field with a slight delay; the ions N+ have higher energy near the two electrode,the ions N2+ have higher density,and the N2+ density is about six times of the N+ density. With as the change of discharge parameter,the change of the energy of ions (N2+,N"1} bombarding rf electrode is obvious,but the change of their density is slightly unconspicuous. The simulated results for electron energy probability distribution function are agreement with the measured results.%采用PIC-MC自治模型,模拟了氮气电容性耦合射频放电的微观等离子体过程及带电粒子(e,N2+,N+)的行为.结果表明,离子(N2+,N+)的运动状态滞后瞬时射频电场的变化；在两极附近,N2+具较高密度,但能量较低,N+具较低的密度但能量较高,两者的密度差6倍左右.两种离子轰击射频电极的能量分布变化规律类似,随放电参数变化,离子(N2+,N+)能量变化显著,其密度变化不明显.模拟的电子能量几率分布与测量结果一致.
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