Electrical model parameters identification of radiofrequency discharge in argon through 1D3V/PIC-MC model

摘要

This work represents a contribution to the modeling of a radiofrequency(RF) discharge in argon at low pressure(from 25 to 200 mTorr).It is started by the validation of the collision cross sections used in the particle model through a comparison between the transport coefficients calculated by these data and the measurements of the transport coefficients already exist in the literature,the particle model is also validated by a comparison between the calculated plasma density and that measured in the literature.The electrical model proposed in this work consists of replacing the RF discharge by a passive circuit(resistance in series with a capacitor),where the resistance represents the plasma medium and the obstruction of the passage of the electronic current,and the capacitor represents the sheaths and the appearance of the displacement current in these regions.The parameters of the electrical model are obtained through particle modeling.The electrical model presented accurately reproduces the current of the discharge,but without considering the phenomenon of distortion.The total harmonic distortion rate follows the variation of the plasma density;its maximum value is 5.75% at 100 mTorr.