旋转式轻元素X射线荧光光谱测量装置的设计

摘要

This paper describes the design of a rotary light vacuum X -ray fluorescence spectrum measurement device .The device uses high performance silicon drift detector ( SDD) to measure light on the samples in vacu-um conditions .The device is mainly composed of the vacuum chamber and the peripheral circuit .Vacuum chamber of sample tray can accommodate 10 samples at a time,and can be arbitrary switched to the measure-ment position .Peripheral circuit mainly include the main control unit ,power supply module ,motor driver mod-ule,pressure module and so on .It implements sample switch ,filter switch,air pump open or stop and pressure value reading at the real -time and other functions .The device has small volume ,low cost ,short measuring cy-cle and high working efficiency which meets the requirement of the light field X fluorescence spectrum measure -ment .%设计了一种旋转式轻元素X射线荧光光谱测量装置。该装置利用高性能硅漂移探测器（ SDD）在真空条件下对样品中轻元素进行测量。该装置主要由真空腔和外围控制电路两部分组成：真空腔样品托盘一次可容纳10个样品，并可任意切换进行测量；外围电路主要由主控单元、电源模块、电机驱动模块、气压模块等组成，主要实现被测样品切换、滤光片切换、气泵的开启或停止以及对气压值实时读取等功能。该装置具有体积小、成本低、测量周期短和工作效率高等特点，满足野外轻元素X射线荧光光谱测量的要求。