表面特征参数的在位检测对生产过程控制可提供十分有用的信息,从而可在制造过程中直接调节加工参数.检测要求取决于应用领域.对于超精密表面,例如微结构的或连续结构的光学器件,宜应用干涉法进行形状检测,因为干涉法有极高的精度和适应性,此外,表面可被迅速检测,因而减少生产时间.但是干涉法对机器振动、噪声或空气扰动等外界影响十分敏感,因而很难在生产环境中完成干涉测量.提出了在机械加工环境中的干涉测量和基于对在位干涉检测中各种基本干涉影响分析结果基础上的仿真.%In-situ measurements of surface characteristics can deliver very helpful informations for the process control, so that process parameters can be adjusted directly during the fabrication process. The requirements are dependent on the field of application. For the applications of ultra precise surfaces, e.g. micro structured or continuous optical components , interferometric form testing may be suited, because of its very high accuracy and flexibility. Furthermore with interferometry the surfaces can be measured very fast, which leads to a reduced production time. However, a disadvantage may be the sensitivity of interferometric systems to external influences, like machine vibrations, noise or air turbulences. Due to this reason, it is very difficult to perform interferometric measurements within a production environment. In this paper we present interferometric measurements in the manufacturing machine environment and simulation based on results of the analysis of fundamental influences on interferometers operated in-situ.
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