一种 Al2 O3陶瓷导轨的超精密加工方法

摘要

Ultra-precision machining process of 700mm Al2 O3 ceramic guide is introduced .Process and detection methods of grinding,lapping and polishing is demonstrated .Polishing process of the guide with self-developed ultra-precision guide grinding and polishing machine ,and detection methods is described in detail .Finally,a Zygo interferometer is used to detect face of the guide,and it shows that the PV value is 0.78λ(λ=632.8nm),the RMS value is 0.1λby sub-aperture stitching technology.%提出了700mm长Al2 O3陶瓷导轨超精密加工的工艺流程；依次介绍了磨削、研磨使用的工艺方法和检测方法，并详细介绍了采用自行研发的超精密导轨研磨抛光机对导轨抛光的工艺方法、工艺参数和检测方法。采用Zygo平面干涉仪检测导轨面形，通过子孔径拼接技术，得到导轨面700mm ×260mm表面面形误差最大峰谷值为0．78λ（λ＝632．8nm），面形误差均方根值为0．1λ。