半导体及集成电路工艺加工设备的调研与采购

摘要

本文通过半导体及集成电路工艺加工设备的调研与采购过程,给出影响并决定采购方调研内容与采购结果的主要关键因素-设备费用、设备技术能力、设备厂商服务与技术支持能力以及有关设备硬件、工艺技术、操作软件的常用参考指标及其含义.总结设备采购规格书包含的主要内容及相关技术验收中的注意事项.提供了设备采购过程中常用商务模式、适用范围、相应付款比例及相应付款方式.讨论了半导体及集成电路工业制造行业与科研教学领域对工艺加工仪器设备的不同需求.%The evaluation and purchases process for semiconductor processing equipment is provided. The key factors for tool evaluation such as system cost, system technical capability and service and support capability are introduced. The useful and important performance index for system hardware, process and software are given with explaination. The purchasing specification, commerce and payment term are reviewed. The difference between semiconductor industry and R&D area in terms of tool performance requirement are discussed.