镀TiN和镀锌钢板的辉光放电原子发射光谱深度轮廓分析

摘要

金属或合金表面的导电或非导体镀层,对改善材料的性能,降低材料的损耗具有很大的作用.如在钢表面镀一层TiN,钢的抗磨损性能会得到提升.探讨各种元素在基体材料表面的分布和渗透行为,对新材料的研究具有十分重要的意义.本文运用直流辉光放电原子发射光谱对镀TiN和镀锌钢板进行了深度轮廓分析.放电电压、放电功率和压力对深度轮廓分析的影响进行了研究,在功率为24.5～28 W和500～1000 Pa放电压力下,可以得到每层4 μm TiN的深度分辨率,并且Ti的谱线强度相对较高.结果表明在相对较低的放电功率和压力下,深度分辩较好.在优化操作条件下,即放电电压700 V,放电电流35～40 mA,Ar压力553 Pa,可以得到Ti的深度轮廓信息,在总深度为60 μm的镀层中,以4 μm的深度分辨率,Ti的含量从28%降低到0.02%.%A conductive or non-conductive coating on the surface of metal and alloy plays an important part in improving the characteristics of material and reducing the wear and tear in use of material. For example, the abradibility of the steel sheet with TiN coating will be increased. To get the concentration of elements on the different coating is very important for the study of the new material. In this paper, a direct current glow discharge atomic emission spectrometry (dc-GDAES) system was applied for the depth profiling of TiN and Zn coating on steel sheet. The influence of operating parameters such as discharge voltage, power and pressure on depth profile was discussed. At the discharge power of 24. 5-28 W and Ar pressure of 500-1 000 Pa, a 4 μm of depth resolution per layer and a relative high Zn and Ti intensity could be obtained. It was found that a good depth resolution could be obtained under relatively low discharge power and pressure. The optimum operation parameters were as follows: the discharge voltage is 700 V, the discharge current is 35-40 mA, the Ar pressure is 553 Pa. The quantitative depth profile approach of TiN coating on steel sheet was achieved.The concentration of Ti in per 4 μm coating was detected. The concentration of Ti decreased from 28% to 0.02% in the 60 μm TiN coating.