TiCN/VCN多层膜的力学和摩擦磨损性能

摘要

采用多靶磁控溅射技术，制备TiCN、VCN单层膜及一系列调制比为1的不同调制周期的TiCN/VCN多层膜。利用X射线衍射仪、纳米压痕仪、高温摩擦磨损测试仪和扫描电子显微镜，研究各种薄膜的微结构、力学性能及室温和高温摩擦磨损性能。研究表明：不同调制周期的TiCN/VCN多层膜的硬度围绕混合法则计算的硬度值上下波动，没有出现致硬现象。TiCN和VCN单层薄膜室温下的摩擦因数很低，TiCN/VCN多层膜调制周期较小时摩擦因数较高，调制周期大于10 nm时摩擦因数逐渐接近TiCN和VCN单层膜。700℃下，TiCN/VCN多层膜的摩擦因数主要取决于表面生成的TiO2和V2O5的共同作用，与TiCN相比，TiCN/VCN多层膜的高温摩擦因数较小。%TiCN, VCN monolithic films and TiCN/VCN mutilayers with different modulation periods were prepared by multi-target magnetic sputtering. The microstructure, mechanical properties, friction and wear properties at room and high-temperature of films were characterized by X-ray diffraction, nano-indentation, and CSM high-temperature ball-on-disc tribometer. The results show that the hardness of TiCN/VCN multilayers is close to the value calculated around the rule of mixtures, and super high hardness does not appear. The friction coefficients of TiCN and VCN films are very low in room-temperature. The friction coefficients of TiCN/VCN mutilayers are higher when their modulation periods are small, but when their modulation periods are more than 10nm, the friction coefficients of TiCN/VCN mutilayers will be close to that of the TiCN and VCN films. When the temperature reach to 700 ℃, The friction coefficients of TiCN/VCN mutilayers are depending on TiO2 and V2O5. Compared with TiCN films, the friction coefficient of TiCN/VCN mutilayers decrease at high temperature.