基于FPGA和ARM的位移测量仪设计

摘要

Grating ruler, as a displacement sensor component, is widely used in optical precision measuring machines and high precision CNC machine tool. The design of a FPGA grating displacement measuring instrument was described. FPGA was used to fine and count output signals from 2 grating sensor separately, and then ARM LPC2132 was used to process signal. The displacements of x and y coordinate of x-y table can be measured reliably. The instrument resolution is 0. 5 μm and its accuracy can better than ± 1 μm. The developed displacement measuring instrument is reliable, simple, easy to debug and extend.%光栅尺作为位移传感元件被广泛应用在光学精密测量机器和高精度的数控机床上.介绍一种采用FPGA的光栅尺位移测量仪的设计方法,通过FPGA对2个光栅传感器输出的信号分别进行细分辨向和计数,再使用ARM LPC2132对计数信号进行处理,能可靠对x-y工作台在x和y方向上的位移分别进行测量.该仪器的分辨率为0.5 μm,精度可优于±1μm.此外,所研制的位移测量仪工作可靠,结构简单,易于调试和扩展.