基于数字全息的单透镜表面轮廓检测

摘要

Digital holograph is proposed as the three-dimensional profile measurement for the optical components,which is charac￣terized by its non-contact,non-destructive, and high efficiency. Off-axis digital holographic transmission system is designed and built. The digital hologram is reconstructed by an angular spectrum reproduction algorithm. In order to improve the quality of the holo￣gram,HRO subtraction is used to eliminate the zero order diffraction interference and the least-squares phase-unwrapping algorithm is used to obtain the 3D contour information of the lens. The experiment results show that digital holograph is feasible and effective for the 3D profile measurement of the optical components.%为了对光学元件的三维面型进行检测，提出了用数字全息的方法实现单透镜的非接触无损、高效率检测。首先构建了离轴透射式数字全息系统，采用角谱算法对数字全息图进行再现，然后采用HRO相减法消除零级衍射干扰像，提高全息图质量，利用最小二乘法对相位进行解包裹，进而获取透镜的三维轮廓信息。实验结果表明，数字全息技术能有效获取光学元件表面轮廓信息。