气膜结构对长光栅刻制气浮平台气膜特性的影响

摘要

In order to meet the design requirements of air⁃bearing table of large stroke raster engraving,the finite ele⁃ment model of gas film was established,and the effects on the gas film characteristics of the air⁃bearings by different lay⁃outs of restrictors and pressure groove structures were analyzed with load capacity,gas consumption,and dead zone velocity as the main indexes.The results reveal that the different air⁃bearing structures will cause various pressure characteristics, which will impact the load capacity,gas consumption and dead zone velocity.The structure of 3×3 restrictor and Wang⁃shaped pressure groove can improve the load capacity, eliminate dead zone velocity of the air⁃bearings and increase gas consumption slightly,it can meet the long time working requirements of air⁃bearing table for large stroke raster engraving.%为满足长光栅刻制气浮平台的设计要求，通过建立气浮导轨上气膜面的有限元模型，以承载能力、耗气量及流场“死区”速度作为性能指标，分析不同的节流器和均压槽形式对气浮导轨气膜特性的影响。结果表明：不同的导轨结构会造成压力场特性发生变化，进而影响气膜承载力、死区速度及耗气量；3×3节流器王字型均压槽的结构形式能有效提高承载能力，消除速度死区，且耗气量未明显增加，该结构能满足长光栅刻制对气浮平台长时间工作的要求。