半导体制造用高纯电子气体新品种的现状

摘要

对我国半导体生产过程中几种主要特种气体的现状进行了回顾,指出了我国超纯电子气体国产化过程中存在的问题.%This paper reviews the status quo of several major special gases in the process of semiconductor production in China, and points out the problems in the process of localization of ultra pure electronic gas in China.