毫秒脉冲激光损伤CCD探测器的实验研究

摘要

In order to study damage effect of interline-transfer color CCD under millisecond pulsed laser irradiation, theoretical analysis and experimental study were carried out.The center temperature, damage area and depth on the CCD surface, the internal reset clock signal and impedance value of the CCD were measured under the action of laser beam with different energy densities.Combined with non-recoverable focal spot and black-white snowflake phenomena in the CCD output images, the damage effect of color plane array CCD irradiated by millisecond pulse laser was analyzed.The results show that the internal structure of the interline transfer color array CCD is damaged to different extents under the irradiation of millisecond pulsed laser.The ablation depth is direct to the basement layer with laser power intensity of 23.49J/cm2 so that the internal signal transmission channel of CCD is cut off and the leakage current is increased, and then, there is no signal output from the CCD, and the CCD is completely damaged.The study is helpful to study the damage effect of CCD detectors under intense laser.%为了研究行间转移型彩色面阵CCD在毫秒脉冲激光辐照下的损伤效果,采用实验研究的方法,测量了不同能量密度的激光作用下,CCD表面中心点温度、受损区域面积、深度及CCD内部复位时钟信号和阻抗值的变化,结合CCD输出图像中出现不可恢复的焦斑及黑白雪花现象,对彩色面阵CCD在毫秒脉冲激光作用下的损伤效果进行了分析.结果表明,在毫秒脉冲激光的辐照作用下,行间转移型彩色面阵CCD内部结构会产生不同程度的烧蚀,当能量密度达到23.49J/cm2时,烧蚀深度直达基底层,致使CCD内部信号传输通道断开,漏电流增加,最终造成CCD无信号输出,完全损坏.该研究对CCD探测器在强激光作用下的损伤效果研究是有帮助的.