热处理对红外窗口镀层金属的影响

摘要

The metal films of the infrared window are made by DC magnetron sputtering. We study and discuss the influence of temperature and time on the mechanical properties of metallic films. Then we use nano-indentation tester to test the mechanical properties of metallic thin films and use optical microscope to observe sudace morpholosy. We find that the temperature of Ge windows has a more significant effect on the mechanical properties of thin metal films.%采用直流磁控溅射法制备红外透过窗口Ge窗的镀层金属.分别讨论了热处理温度和热处理时间对Ge窗金属化体系力学特性的影响.用纳米压痕仪测试仪测试Ge窗金属化体系的显微力学特性,并用金相显微镜观测金属薄膜的表面形貌,发现退火温度对Ge窗片上的金属薄膜的力学特性有较明显影响.