SOI材料在光电子学中的应用

摘要

SOI (silicon-on-insulater) material is an important kind of optical waveguide materials for silicon-based optoelectronics applications. In recent years, with the maturation of facture and manufacture technology of SOI material, the research on SOI-based optical waveguide devices have attracted more and more attentions. In this paper,the specific application of SOI material in silicon-based optoelectronics are introduced, including the recent developments in thermo-optic devices,electro-optic devices,optical coupler which connects sub-micron optical waveguide and fiber,integrated optoelectronic chip etc. Smaller waveguide cross-section is the developing direction of SOI-based optical waveguide devices in the future.%SOI材料是应用于硅基光电子学中的一种重要的光波导材料.近年来随着SOI材料制备和加工技术的成熟,SOI基光波导器件的研究日益受到人们的重视.文章介绍了SOI材料在光电子学领域的一些具体应用,包括了在热光器件、电光器件、亚微米波导器件与光纤的耦合器以及光电子集成芯片等方面的最新研究进展.更小的波导截面尺寸是未来SOI光波导器件发展的必然趋势.