多功能光纤端面激光宽带减反射膜的应用研究

摘要

A novel near-infrared fiber broadband laser antireflection film within 800 ~1300 nm band is designed,and it can apply to multi-band high-power semiconductor lasers and has high damage threshold.By selecting a suitable op-tical material,simulating with TFCalc software,adjusting the optimal process parameters,and using thermal evapora-tion vacuum coating instrument and RF ion source assisted deposition method,the problems of end face cleaning of small-diameter fibers and coating adhere strength of low temperature coating are solved.The sample spectra after coat-ing are analyzed by Agilent CARY6000i optical measurement system.The results show that the average transmission of this antireflection film is 99.2% within the range of 800 ~1300 nm.Taking single tube 808 nm,980nm and 1064 nm semiconductor lasers as the light source respectively,the output power of multimode fiber after coating has improved significantly.This film can effectively improve the coupling efficiency of high-power semiconductor laser and optical fi-ber,and has good application values.%在光学系统中，设计了一种新型的近红外光纤宽带激光减反射膜，应用波段为800～1300 nm，能够同时适用于多波段大功率半导体激光器并具备较高损伤阈值。通过选择合适的光学材料，利用 TFCalc 软件仿真，调整最佳的工艺参数，采用热蒸发式真空镀膜机及 RF 离子源辅助沉积的方法，解决了小口径光纤端面的清洁和低温镀膜时膜层的牢固性等问题，实验采用 Agilent CARY6000i 型光波测量系统对镀膜后的样品进行光谱分析，实验结果显示，该减反射膜在800～1300 nm 平均透射率为99．2％。分别用单管808 nm、980 nm 和1064 nm 半导体激光器为光源测得多模光纤镀膜后的输出功率较镀膜前均有明显提高。该膜层有效地提高了大功率半导体激光器与光纤的耦合效率具有更好的应用价值和实用意义。