中红外3.9μm长波通截止滤光膜研制

摘要

以薄膜光学和激光红外技术为背景,介绍了3.9 μm长波通截止滤光膜的用途、设计与制备方法.基于波动光学原理,首先分析了滤光膜设计方面的难点,其次讨论了薄膜选材、通带展宽、工艺制备等研究过程中的主要技术问题.利用计算机优化软件进行优化计算后,结合离子辅助工艺得到了吸收小、透过率高、光洁度与附着力良好的薄膜.目前相关的技术应用在中红外系统中有效改善了信噪比和响应度.%Based on thin film optics,laser and infrared technology,the usefulness,design and preparation methods of 3.9 μm long-pass filter coatings in middle infrared band are presented.According to the principle of wave optics,the design difficulties of filter coatings were analyzed,and then some technical problems of material selection,pass band broadening and process preparation were discussed.After optimal design,the coatings with low absorption,high transmittance,well surface and adhesion were obtained by combining ion-assisted technology.This technology can effectively improve SNR and responsivity for the mid-infrared system.