集成式杜瓦组件真空寿命评测及影响因素分析

摘要

制冷机集成式金属杜瓦组件已广泛应用于256×256以上规模的红外焦平面阵列器件,杜瓦真空寿命成为制约探测器性能的关键指标.本文针此金属杜瓦组件通用结构,用氦漏率检测、静态热负载测试及高温加速实验等多种方法对杜瓦真空寿命进行了评测,并分析了影响杜瓦真空寿命的主要因素,对金属杜瓦研究具有实际意义.分析表明,真空寿命的主要影响因素包括漏气和放气,制造工艺改进可将金属杜瓦漏气控制在设计指标内,金属杜瓦内部放气可通过真空烘烤、安装吸气剂等方法消除,研制的杜瓦组件经验证真空存储寿命超过12年.%Integrated Detector Dewar Cooler Assembly (IDDCA) has been widely used for IRFPA detectors above 256 × 256 scale.Dewar vacuum life has become one key indicator which restricted the detector performance.For a general construction of IDDCA,Dewar vacuum life was tested by several ways,such as helium leakage rate test,heat load test and high temperature accelerated test.Main influence factors of Dewar vacuum life were analyzed.Analysis results show that leakage and outgassing are two main influence factors for Dewar vacuum life.The technology improvement can well control Dewar leakage,and vacuum baking and getter can eliminate Dewar outgassing.The vacuum life of self-developed IDDCA is over 12 years.